22. (Invited Paper) (Selected as a Featured Article) “Atomic Layer Deposition of a Uniform Thin Film on 2-dimensional Transition Metal Dichalcogenides”
Taewook Nam, Seunggi Seo, and Hyungjun Kim
Journal of Vacuum Science and Technology A, 38, 030803 (2020) [Link]
21. “Comparative Study on Atomic Layer Deposition of HfO2 via Substitution of Ligand Structure with Cyclopentadiene“